Ontology highlight
ABSTRACT:
SUBMITTER: Liu J
PROVIDER: S-EPMC7952555 | biostudies-literature | 2021 Mar
REPOSITORIES: biostudies-literature
Liu Jinchao J Zhang Di D Yu Dianqiang D Ren Mengxin M Xu Jingjun J
Light, science & applications 20210312 1
Ellipsometry is a powerful method for determining both the optical constants and thickness of thin films. For decades, solutions to ill-posed inverse ellipsometric problems require substantial human-expert intervention and have become essentially human-in-the-loop trial-and-error processes that are not only tedious and time-consuming but also limit the applicability of ellipsometry. Here, we demonstrate a machine learning based approach for solving ellipsometric problems in an unambiguous and fu ...[more]