Ontology highlight
ABSTRACT:
SUBMITTER: Farr NTH
PROVIDER: S-EPMC8199708 | biostudies-literature | 2021 Jun
REPOSITORIES: biostudies-literature
Farr Nicholas T H NTH Hughes Gareth M GM Rodenburg Cornelia C
Materials (Basel, Switzerland) 20210602 11
It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon present but also on its bonding state. Despite this, the presence of carbon and its bonding state is not regularly monitored in FIB-SEMs. Here we demonstrated that Secondary Electron Hyperspectral Ima ...[more]