A Simplified Method for Patterning Graphene on Dielectric Layers.
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ABSTRACT:
SUBMITTER: Rost HI
PROVIDER: S-EPMC8365599 | biostudies-literature | 2021 Aug
REPOSITORIES: biostudies-literature
Publications
A Simplified Method for Patterning Graphene on Dielectric Layers.
Røst Håkon I HI Reed Benjamen P BP Strand Frode S FS Durk Joseph A JA Evans D Andrew DA Grubišić-Čabo Antonija A Wan Gary G Cattelan Mattia M Prieto Mauricio J MJ Gottlob Daniel M DM Tănase Liviu C LC de Souza Caldas Lucas L Schmidt Thomas T Tadich Anton A Cowie Bruce C C BCC Chellappan Rajesh Kumar RK Wells Justin W JW Cooil Simon P SP
ACS applied materials & interfaces 20210730 31
The large-scale formation of patterned, quasi-freestanding graphene structures supported on a dielectric has so far been limited by the need to transfer the graphene onto a suitable substrate and contamination from the associated processing steps. We report μm scale, few-layer graphene structures formed at moderate temperatures (600-700 °C) and supported directly on an interfacial dielectric formed by oxidizing Si layers at the graphene/substrate interface. We show that the thickness of this und ...[more]
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