Unknown

Dataset Information

0

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication.


ABSTRACT: The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic optical microscope. Suggested kit for the micromask lithography is compact and easily compatible with a glove box, thus being suitable for a wide range of air-unstable materials. The shadow masks could be either ordered commercially or fabricated in a laboratory using a beam lithography. The processes of the mask alignment and the resist exposure take a few minutes and provide a micrometer resolution. With the total price of the kit components around USD 200, our approach would be convenient for laboratories with the limited access to commercial lithographic systems.

SUBMITTER: Pugachev MV 

PROVIDER: S-EPMC8397995 | biostudies-literature |

REPOSITORIES: biostudies-literature

Similar Datasets

| S-EPMC9041141 | biostudies-literature
| S-EPMC4550510 | biostudies-other
| S-EPMC6119901 | biostudies-other
| S-EPMC8168326 | biostudies-literature
| S-EPMC5959872 | biostudies-other
| S-EPMC8425919 | biostudies-literature
| S-EPMC8708078 | biostudies-literature
| S-EPMC9355982 | biostudies-literature
2015-08-17 | GSE70482 | GEO
| S-EPMC10034775 | biostudies-literature