Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation.

ABSTRACT: Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis o

SUBMITTER: Melnikov A 

PROVIDER: S-EPMC8433289 | biostudies-literature | 2021

REPOSITORIES: biostudies-literature