A novel microscale selective laser sintering (μ-SLS) process for the fabrication of microelectronic parts.

ABSTRACT: One of the biggest challenges in microscale additive manufacturing is the production of three-dimensional, microscale metal parts with a high enough throughput to be relevant for commercial applications. This paper presents a new microscale additive manufacturing process called microscale selective laser sintering (μ-SLS) that can produce true 3D metal parts with sub-5 μm resolution and a throughput of greater than 60 mm³/hour. In μ-SLS, a layer of metal nanoparticle ink is first coated onto a substrate using a slot die coating system. The ink is then dried to produce a uniform nanoparticle layer. Next, the substrate is precisely positioned under an optical subsystem using a set of coarse and fine nanopositioning stages. In the optical subsystem, laser light that has been patter

SUBMITTER: Roy NK 

PROVIDER: S-EPMC8433322 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature