Ontology highlight
ABSTRACT:
SUBMITTER: Al Ktash M
PROVIDER: S-EPMC8588143 | biostudies-literature | 2021 Nov
REPOSITORIES: biostudies-literature
Al Ktash Mohammad M Stefanakis Mona M Englert Tim T Drechsel Maryam S L MSL Stiedl Jan J Green Simon S Jacob Timo T Boldrini Barbara B Ostertag Edwin E Rebner Karsten K Brecht Marc M
Sensors (Basel, Switzerland) 20211104 21
Hyperspectral imaging and reflectance spectroscopy in the range from 200-380 nm were used to rapidly detect and characterize copper oxidation states and their layer thicknesses on direct bonded copper in a non-destructive way. Single-point UV reflectance spectroscopy, as a well-established method, was utilized to compare the quality of the hyperspectral imaging results. For the laterally resolved measurements of the copper surfaces an UV hyperspectral imaging setup based on a pushbroom imager wa ...[more]