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Deep-Learning-Assisted Focused Ion Beam Nanofabrication.

ABSTRACT: Focused ion beam (FIB) milling is an important rapid prototyping tool for micro- and nanofabrication and device and materials characterization. It allows for the manufacturing of arbitrary structures in a wide variety of materials, but establishing the process parameters for a given task is a multidimensional optimization challenge, usually addressed through time-consuming, iterative trial-and-error. Here, we show that deep learning from prior experience of manufacturing can predict the postfabrication appearance of structures manufactured by focused ion beam (FIB) milling with >96% accuracy over a range of ion beam parameters, taking account of instrument- and target-specific artifacts. With predictions taking only a few milliseconds, the methodology may be deployed in near real time to expedite optimization and improve reproducibility in FIB processing.

SUBMITTER: Buchnev O

PROVIDER: S-EPMC9097578 | biostudies-literature | 2022 Apr

REPOSITORIES: biostudies-literature

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Deep-Learning-Assisted Focused Ion Beam Nanofabrication.

Buchnev Oleksandr O Grant-Jacob James A JA Eason Robert W RW Zheludev Nikolay I NI Mills Ben B MacDonald Kevin F KF

Nano letters 20220324 7

Focused ion beam (FIB) milling is an important rapid prototyping tool for micro- and nanofabrication and device and materials characterization. It allows for the manufacturing of arbitrary structures in a wide variety of materials, but establishing the process parameters for a given task is a multidimensional optimization challenge, usually addressed through time-consuming, iterative trial-and-error. Here, we show that deep learning from prior experience of manufacturing can predict the postfabr ...[more]

PMID: 35324209

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