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Hybrid Lithographic Arbitrary Patterning of TiO₂ Nanorod Arrays.

ABSTRACT: In this work, we report a hybrid lithographic method that combines the top-down soft lithography and the bottom-up hydrothermal approach for growing single-crystalline TiO₂ nanorod arrays with arbitrary patterns. The arbitrary patterns of TiO₂ seeds were obtained through the microcontact printing of the TiO₂ seed precursor onto Si substrates using prepatterned poly(dimethylsiloxane) (PDMS) as stamps, followed by a baking process. Afterward, TiO₂ nanorod arrays were selectively grown on patterned TiO₂ seeds through conventional hydrothermal methods. By controlling the TiO₂ seed precursor concentration, the hydrothermal reaction time and temperature and the patterns, the morphology and density of the TiO₂ nanorods can be tuned in a controllable manner. Overall, this work provides a new strategy for the low-cost and facile preparation of patterned TiO₂ nanorod arrays that has potential applications in micro-nano-optoelectronic devices and other fields.

SUBMITTER: Wang J

PROVIDER: S-EPMC9245127 | biostudies-literature | 2022 Jun

REPOSITORIES: biostudies-literature

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Hybrid Lithographic Arbitrary Patterning of TiO2 Nanorod Arrays.

Wang Jiabao J Ji Zhenkai Z Xu Xiuzhen X Chen Tiantian T Chen Bo B Gao Guohua G Ma Jiwei J Nie Xipeng X Xu Xiaobin X

ACS omega 20220610 25

In this work, we report a hybrid lithographic method that combines the top-down soft lithography and the bottom-up hydrothermal approach for growing single-crystalline TiO2 nanorod arrays with arbitrary patterns. The arbitrary patterns of TiO2 seeds were obtained through the microcontact printing of the TiO2 seed precursor onto Si substrates using prepatterned poly(dimethylsiloxane) (PDMS) as stamps, followed by a baking process. Afterward, TiO2 nanoro ...[more]

PMID: 35785324

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