Ontology highlight
ABSTRACT:
SUBMITTER: Wordenweber H
PROVIDER: S-EPMC9637179 | biostudies-literature | 2022 Nov
REPOSITORIES: biostudies-literature
Wördenweber Henrik H Karthäuser Silvia S Grundmann Annika A Wang Zhaodong Z Aussen Stephan S Kalisch Holger H Vescan Andrei A Heuken Michael M Waser Rainer R Hoffmann-Eifert Susanne S
Scientific reports 20221105 1
Metal-free chemical vapor deposition (CVD) of single-layer graphene (SLG) on c-plane sapphire has recently been demonstrated for wafer diameters of up to 300 mm, and the high quality of the SLG layers is generally characterized by integral methods. By applying a comprehensive analysis approach, distinct interactions at the graphene-sapphire interface and local variations caused by the substrate topography are revealed. Regions near the sapphire step edges show tiny wrinkles with a height of abou ...[more]