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Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity.

ABSTRACT: Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 - 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.

SUBMITTER: Lee D

PROVIDER: S-EPMC9981767 | biostudies-literature | 2023 Mar

REPOSITORIES: biostudies-literature

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Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity.

Lee Daehun D Jahanbani Shahin S Kramer Jack J Lu Ruochen R Lai Keji K

Nature communications 20230302 1

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 - 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profi ...[more]

PMID: 36864039

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Project description:Subharmonic intravascular ultrasound imaging (S-IVUS) could visualize the adventitial vasa vasorum, but the high pressure threshold required to incite subharmonic behavior in an ultrasound contrast agent will compromise sensitivity-a trait that has hampered the clinical use of S-IVUS. The purpose of this study was to assess the feasibility of using coded-chirp excitations to improve the sensitivity and axial resolution of S-IVUS.The subharmonic response of Targestar-p(TM), a commercial microbubble ultrasound contrast agent (UCA), to coded-chirp (5%-20% fractional bandwidth) pulses and narrowband sine-burst (4% fractional bandwidth) pulses was assessed, first using computer simulations and then experimentally. Rectangular windowed excitation pulses with pulse durations ranging from 0.25 to 3 μs were used in all studies. All experimental studies were performed with a pair of transducers (20 MHz/10 MHz), both with diameter of 6.35 mm and focal length of 50 mm. The size distribution of the UCA was measured with a Casy(TM) Cell counter.The simulation predicted a pressure threshold that was an order of magnitude higher than that determined experimentally. However, all other predictions were consistent with the experimental observations. It was predicted that: (1) exciting the agent with chirps would produce stronger subharmonic response relative to those produced by sine-bursts; (2) increasing the fractional bandwidth of coded-chirp excitation would increase the sensitivity of subharmonic imaging; and (3) coded-chirp would increase axial resolution. The experimental results revealed that subharmonic-to-fundamental ratios obtained with chirps were 5.7 dB higher than those produced with sine-bursts of similar duration. The axial resolution achieved with 20% fractional bandwidth chirps was approximately twice that achieved with 4% fractional bandwidth sine-bursts.The coded-chirp method is a suitable excitation strategy for subharmonic IVUS imaging. At the 20 MHz transmission frequency and 20% fractional bandwidth, coded-chirp excitation appears to represent the ideal tradeoff between subharmonic strength and axial resolution.

Dataset Information

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity.

Publications

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity.

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