Unknown

Dataset Information

0

Sequential shrink photolithography for plastic microlens arrays.


ABSTRACT: Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed thermoplastic sheet, the dots shrink to a fraction of their original size, which we then lithographically transfer onto photoresist-coated commodity shrink wrap film. This shrink film reduces in area by 95% when briefly heated, creating smooth convex photoresist bumps down to 30 µm. Taken together, this sequential shrink process provides a complete process to create microlenses, with an almost 99% reduction in area from the original pattern size. Finally, with a lithography molding step, we emboss these bumps into optical grade plastics such as cyclic olefin copolymer for functional microlens arrays.

SUBMITTER: Dyer D 

PROVIDER: S-EPMC3155578 | biostudies-other | 2011 Jul

REPOSITORIES: biostudies-other

Similar Datasets

| S-EPMC187555 | biostudies-literature
| S-EPMC3316890 | biostudies-other
| S-EPMC4700459 | biostudies-other
| S-EPMC7014117 | biostudies-literature
| S-EPMC4605028 | biostudies-other
| S-EPMC7060193 | biostudies-literature
| S-EPMC3722280 | biostudies-literature
2004-10-29 | GSE1904 | GEO
| S-EPMC149860 | biostudies-literature
| S-EPMC6707258 | biostudies-literature