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Influence of preferred orientation on the electrical conductivity of fluorine-doped tin oxide films.


ABSTRACT: Current development of high-performance transparent conductive oxide (TCO) films is limited with tradeoff between carrier mobility and concentration since none of them can be improved without sacrificing the other. In this study, we prepare fluorine doped tin oxide (FTO) films by chemical vapor deposition with inclusions of different additives and report that the mobility can be varied from 0.65 to 28.5 cm(2) V(-1) s(-1) without reducing the achieved high carrier concentration of 4 × 10(20) cm(-3). Such an increase in mobility is shown to be clearly associated with the development of (200) preferred orientation (PO) but concurrent degradation of (110) PO in films. Thus, at a constant high carrier concentration, the electrical conductivity can be improved via carrier mobility simply by PO control. Such a one-step approach avoiding conventional post-deposition treatment is suggested for developing next-generation FTO as well as other TCO films with better than ever conductivities.

SUBMITTER: Wang JT 

PROVIDER: S-EPMC3890905 | biostudies-other | 2014

REPOSITORIES: biostudies-other

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Influence of preferred orientation on the electrical conductivity of fluorine-doped tin oxide films.

Wang Jian Tao JT   Shi Xiang Lei XL   Liu Wei Wei WW   Zhong Xin Hua XH   Wang Jian Nong JN   Pyrah Leo L   Sanderson Kevin D KD   Ramsey Philip M PM   Hirata Masahiro M   Tsuri Keiko K  

Scientific reports 20140114


Current development of high-performance transparent conductive oxide (TCO) films is limited with tradeoff between carrier mobility and concentration since none of them can be improved without sacrificing the other. In this study, we prepare fluorine doped tin oxide (FTO) films by chemical vapor deposition with inclusions of different additives and report that the mobility can be varied from 0.65 to 28.5 cm(2) V(-1) s(-1) without reducing the achieved high carrier concentration of 4 × 10(20) cm(-  ...[more]

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