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Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence.

ABSTRACT: We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.

SUBMITTER: Gregoire JM

PROVIDER: S-EPMC4043122 | biostudies-other | 2010 Sep

REPOSITORIES: biostudies-other

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