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Stencil nano lithography based on a nanoscale polymer shadow mask: towards organic nanoelectronics.


ABSTRACT: A stencil lithography technique has been developed to fabricate organic-material-based electronic devices with sub-micron resolution. Suspended polymethylmethacrylate (PMMA) membranes were used as shadow masks for defining organic channels and top electrodes. Arrays of pentacene field effect transistors (FETs) with various channel lengths from 50??m down to 500?nm were successfully produced from the same batch using this technique. Electrical transport measurements showed that the electrical contacts of all devices were stable and the normalized contact resistances were much lower than previously studied organic FETs. Scaling effects, originating from the bulk space charge current, were investigated by analyzing the channel-length-dependent mobility and hysteresis behaviors. This novel lithography method provides a reliable means for studying the fundamental transport properties of organic materials at the nanoscale as well as enabling potential applications requiring the fabrication of integrated organic nanoelectronic devices.

SUBMITTER: Yun H 

PROVIDER: S-EPMC4426698 | biostudies-other | 2015

REPOSITORIES: biostudies-other

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Stencil nano lithography based on a nanoscale polymer shadow mask: towards organic nanoelectronics.

Yun Hoyeol H   Kim Sangwook S   Kim Hakseong H   Lee Junghyun J   McAllister Kirstie K   Kim Junhyung J   Pyo Sengmoon S   Sung Kim Jun J   Campbell Eleanor E B EE   Hyoung Lee Wi W   Wook Lee Sang S  

Scientific reports 20150511


A stencil lithography technique has been developed to fabricate organic-material-based electronic devices with sub-micron resolution. Suspended polymethylmethacrylate (PMMA) membranes were used as shadow masks for defining organic channels and top electrodes. Arrays of pentacene field effect transistors (FETs) with various channel lengths from 50 μm down to 500 nm were successfully produced from the same batch using this technique. Electrical transport measurements showed that the electrical con  ...[more]

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