Ontology highlight
ABSTRACT:
SUBMITTER: Ryu J
PROVIDER: S-EPMC5487822 | biostudies-other | 2017
REPOSITORIES: biostudies-other
Ryu JiHyeong J Lee Ho H Lee Sang-Ho SH Lim HyungJun H Lee JaeJong J
Nano convergence 20170613 1
A numerical method using the modified squeeze model is proposed in this paper in order to overcome the limitation of the established squeeze equation and obtain filling ratios for nanoimprint lithography (NIL). Because the imprinting velocity is overestimated when the ratio of indenter width to polymer thickness is close to unity, the modified equation is critical. For verification, the numerical results are compared with the experimental data according to the various stamp geometries and pressu ...[more]