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Synthesis and Characterization of Tungsten Amide Complexes for the Deposition of Tungsten Disulfide Thin Films.


ABSTRACT: To substitute corrosive halogen ligands, we designed and synthesized novel tungsten complexes containing amido ligands, W(DMEDA)3 (1) and W(DEEDA)3 (2) (DMEDA = N,N'-dimethylethylenediamido; DEEDA = N,N'-diethylethylenediamido). Complexes 1 and 2 were characterized by 1H NMR, 13C NMR, FT-IR, and elemental analysis. The pseudo-octahedral molecular structure of 1 was confirmed by single-crystal X-ray crystallography. The thermal properties of 1 and 2 were analyzed by thermogravimetric analysis (TGA), which confirmed that the precursors were volatile and exhibited adequate thermal stability. Additionally, the WS2 deposition test was performed using 1 in thermal chemical vapor deposition (thermal CVD). Further analysis of the surface of the thin films was conducted using Raman spectroscopy, scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS).

SUBMITTER: Son JY 

PROVIDER: S-EPMC10249077 | biostudies-literature | 2023 Jun

REPOSITORIES: biostudies-literature

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Synthesis and Characterization of Tungsten Amide Complexes for the Deposition of Tungsten Disulfide Thin Films.

Son Ji Young JY   Kim Su Han SH   Seo Ji Min JM   Lim Jongsun J   Chung Taek-Mo TM   Park Bo Keun BK  

ACS omega 20230524 22


To substitute corrosive halogen ligands, we designed and synthesized novel tungsten complexes containing amido ligands, W(DMEDA)<sub>3</sub> (<b>1</b>) and W(DEEDA)<sub>3</sub> (<b>2</b>) (DMEDA = <i>N</i>,<i>N</i>'-dimethylethylenediamido; DEEDA = <i>N</i>,<i>N</i>'-diethylethylenediamido). Complexes <b>1</b> and <b>2</b> were characterized by <sup>1</sup>H NMR, <sup>13</sup>C NMR, FT-IR, and elemental analysis. The pseudo-octahedral molecular structure of <b>1</b> was confirmed by single-cryst  ...[more]

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