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Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films.

ABSTRACT: Tungsten nitrido amido guanidinato complexes of the type WN(NR2)[(NR')2C(NR2)]2 (R = Me, Et; R' = i Pr, Cy) were synthesized as precursors for aerosol-assisted chemical vapor deposition (AACVD) of WNxCy thin films. The reaction of tungsten nitrido amido complexes of the type WN(NR2)3 (R = Me, Et) with two equivalents of a carbodiimide R'N=C=NR' (R' = i Pr, Cy) resulted in two insertions of a carbodiimide into W-N(amido) bonds, affording bis(guanidinato) amido nitrido tungsten complexes. These compounds were characterized by 14N NMR, indicating distinctive chemical shifts for each type of N-bound ligand. Crystallographic structure determination of WN(NMe2)[(N i Pr)2C(NMe2)]2 showed the guanidinato ligands to be non-equivalent. The complex WN(NMe2)[(N i Pr)2C(NMe2)]2 was demonstrated to serve as a precursor for AACVD of WNxCy thin films, resulting in featureless, X-ray amorphous thin films for growth temperatures 200 - 400 °C.

SUBMITTER: Nolan MM 

PROVIDER: S-EPMC6715305 | biostudies-literature | 2018 Jan

REPOSITORIES: biostudies-literature

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Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN<sub>x</sub>C<sub>y</sub> Thin Films.

Nolan Michelle M MM   Touchton Alexander J AJ   Richey Nathaniel E NE   Ghiviriga Ion I   Rocca James R JR   Abboud Khalil A KA   McElwee-White Lisa L  

European journal of inorganic chemistry 20171204 1

Tungsten nitrido amido guanidinato complexes of the type WN(NR<sub>2</sub>)[(NR')<sub>2</sub>C(NR<sub>2</sub>)]<sub>2</sub> (R = Me, Et<sub>;</sub> R' = <sup><i>i</i></sup> Pr, Cy) were synthesized as precursors for aerosol-assisted chemical vapor deposition (AACVD) of WN<sub>x</sub>C<sub>y</sub> thin films. The reaction of tungsten nitrido amido complexes of the type WN(NR<sub>2</sub>)<sub>3</sub> (R = Me, Et) with two equivalents of a carbodiimide R'N=C=NR' (R' = <sup><i>i</i></sup> Pr, Cy) re  ...[more]

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