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Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography.

ABSTRACT: A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6 plasma, to produce Si nanofeatured molds.

SUBMITTER: Lorenzoni M

PROVIDER: S-EPMC3576257 | biostudies-literature | 2013 Feb

REPOSITORIES: biostudies-literature

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Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography.

Lorenzoni Matteo M Giugni Andrea A Torre Bruno B Torre Bruno B

Nanoscale research letters 20130213 1

A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide patter ...[more]

PMID: 23406405

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