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High-performance, low-voltage electroosmotic pumps with molecularly thin silicon nanomembranes.


ABSTRACT: We have developed electroosmotic pumps (EOPs) fabricated from 15-nm-thick porous nanocrystalline silicon (pnc-Si) membranes. Ultrathin pnc-Si membranes enable high electroosmotic flow per unit voltage. We demonstrate that electroosmosis theory compares well with the observed pnc-Si flow rates. We attribute the high flow rates to high electrical fields present across the 15-nm span of the membrane. Surface modifications, such as plasma oxidation or silanization, can influence the electroosmotic flow rates through pnc-Si membranes by alteration of the zeta potential of the material. A prototype EOP that uses pnc-Si membranes and Ag/AgCl electrodes was shown to pump microliter per minute-range flow through a 0.5-mm-diameter capillary tubing with as low as 250 mV of applied voltage. This silicon-based platform enables straightforward integration of low-voltage, on-chip EOPs into portable microfluidic devices with low back pressures.

SUBMITTER: Snyder JL 

PROVIDER: S-EPMC3831982 | biostudies-literature | 2013 Nov

REPOSITORIES: biostudies-literature

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High-performance, low-voltage electroosmotic pumps with molecularly thin silicon nanomembranes.

Snyder Jessica L JL   Getpreecharsawas Jirachai J   Fang David Z DZ   Gaborski Thomas R TR   Striemer Christopher C CC   Fauchet Philippe M PM   Borkholder David A DA   McGrath James L JL  

Proceedings of the National Academy of Sciences of the United States of America 20131028 46


We have developed electroosmotic pumps (EOPs) fabricated from 15-nm-thick porous nanocrystalline silicon (pnc-Si) membranes. Ultrathin pnc-Si membranes enable high electroosmotic flow per unit voltage. We demonstrate that electroosmosis theory compares well with the observed pnc-Si flow rates. We attribute the high flow rates to high electrical fields present across the 15-nm span of the membrane. Surface modifications, such as plasma oxidation or silanization, can influence the electroosmotic f  ...[more]

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