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Large-scale integration of nanoelectromechanical systems for gas sensing applications.

ABSTRACT: We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.

SUBMITTER: Bargatin I

PROVIDER: S-EPMC3839335 | biostudies-literature | 2012 Mar

REPOSITORIES: biostudies-literature

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Large-scale integration of nanoelectromechanical systems for gas sensing applications.

Bargatin I I Myers E B EB Aldridge J S JS Marcoux C C Brianceau P P Duraffourg L L Colinet E E Hentz S S Andreucci P P Roukes M L ML

Nano letters 20120210 3

We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extrem ...[more]

PMID: 22280452

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