Ontology highlight
ABSTRACT:
SUBMITTER: Etzelstorfer T
PROVIDER: S-EPMC3874020 | biostudies-literature | 2014 Jan
REPOSITORIES: biostudies-literature
Journal of synchrotron radiation 20131102 Pt 1
Strained semiconductors are ubiquitous in microelectronics and microelectromechanical systems, where high local stress levels can either be detrimental for their integrity or enhance their performance. Consequently, local probes for elastic strain are essential in analyzing such devices. Here, a scanning X-ray sub-microprobe experiment for the direct measurement of deformation over large areas in single-crystal thin films with a spatial resolution close to the focused X-ray beam size is presente ...[more]