Sacrificial adhesive bonding: a powerful method for fabrication of glass microchips.
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ABSTRACT: A new protocol for fabrication of glass microchips is addressed in this research paper. Initially, the method involves the use of an uncured SU-8 intermediate to seal two glass slides irreversibly as in conventional adhesive bonding-based approaches. Subsequently, an additional step removes the adhesive layer from the channels. This step relies on a selective development to remove the SU-8 only inside the microchannel, generating glass-like surface properties as demonstrated by specific tests. Named sacrificial adhesive layer (SAB), the protocol meets the requirements of an ideal microfabrication technique such as throughput, relatively low cost, feasibility for ultra large-scale integration (ULSI), and high adhesion strength, supporting pressures on the order of 5 MPa. Furthermore, SAB eliminates the use of high temperature, pressure, or potential, enabling the deposition of thin films for electrical or electrochemical experiments. Finally, the SAB protocol is an improvement on SU-8-based bondings described in the literature. Aspects such as substrate/resist adherence, formation of bubbles, and thermal stress were effectively solved by using simple and inexpensive alternatives.
Project description:Glass is a desired material for many microfluidics applications. It is chemically resistant and has desirable characteristics for capillary electrophoresis. The process to make a glass chip, however, is lengthy and inconvenient, with the most difficult step often being the bonding of two planar glass substrates. Here we describe a new glass bonding technique, which requires only washing of the glass surfaces with a calcium solution and 1-2 h of bonding at 115 degrees C. We found calcium uniquely allows for this simple and efficient low-temperature bonding to occur, and none of the other cations we tried (e.g., Na (+), Mg (2+), Mn (3+)) resulted in satisfactory bonding. We determined this bond is able to withstand high applied field strengths of at least up to 4 kV x cm (-1). When intense pressure was applied to a fluid inlet, a circular portion of the coverslip beneath the well exploded outward but very little of the glass-glass interface debonded. In combination with the directed hydrofluoric acid etching of a glass substrate using a poly(dimethylsiloxane) (PDMS) etch guide, we were able to make glass chips with better than 90% yield within 6 h. This technique is compatible with inexpensive unpolished glass and is limited in resolution by the PDMS etch guide used and the intrinsic properties of isotropic etching.
Project description:In this study, we propose a solution process for realizing colored glass for building integrated photovoltaic (BIPV) systems by spin coating a color solution composed of pearlescent pigments mixed in a Norland Optical Adhesive (NOA) matrix. Color solutions are made from mixing pearlescent pigments in NOA63. Compared to a physical vapor deposition process, color coatings are achieved by spin coating in a relatively simple and inexpensive process at room temperature. The optical properties can be easily controlled by adjusting the spin coating speed and the concentration of the pearlescent pigments. The produced colored glass achieved a high transmittance of 85% or more in the visible wavelength range, except for the wavelength spectrum exhibiting the maximum reflectance. In addition, we propose a one-step lamination process of colored glass on a solar cell by leveraging on the adhesive property of the NOA matrix. This eliminates the cost and process of additional ethylene vinyl acetate (EVA) layer or other materials used in the conventional lamination process. The colored glass produced through this study has stability that does not change its properties over time. Therefore, it is expected to be applied to the BIPV solar module market where aesthetics and energy efficiency are required.
Project description:We report a novel modification of silicone elastomer polydimethylsiloxane (PDMS) with a polymer graft that allows interfacial bonding between an elastomer and glass substrate to be performed without exposure of the substrate to harsh treatment conditions, such as oxygen plasma. Organic molecules can thus be patterned within microfluidic channels and still remain functional post-bonding. In addition, after polymer grafting the PDMS can be stored in a desiccator for at least 40 days, and activated upon exposure to acidic buffer for bonding. The bonded devices remain fully bonded in excess of 80 psi driving pressure, with no signs of compromise to the bond integrity. Finally, we demonstrate the compatibility of our method with biological molecules using a proof-of-concept DNA sensing device, in which fluorescently-labelled DNA targets are successfully captured by a patterned probe in a device sealed using our method, while the pattern on a plasma-treated device was completely destroyed. Therefore, this method provides a much-needed alternative bonding process for incorporation of biological molecules in microfluidic devices.
Project description:This work proposes an "N2-1" sacrificial strategy to help to improve the accuracy of the bonding technique from the existing level. The target micropattern is copied N2 times, and (N2-1) of them are sacrificed to obtain the most accurate alignment. Meanwhile, a method for manufacturing auxiliary solid alignment lines on transparent materials is proposed to visualize auxiliary marks and facilitate the alignment. Though the principle and procedure of alignment are straightforward, the alignment accuracy substantially improved compared to the original method. With this technique, we have successfully fabricated a high-precision 3D electroosmotic micropump just using a conventional desktop aligner. Because of the high precision during the alignment, the flow velocity is up to 435.62 μm/s at a driven voltage of 40 V, which far exceeds the previous similar reports. Thus, we believe that it has great potential for high precision microfluidic device fabrications.
Project description:The out-of-plane integration of microfabricated planar microchips into functional three-dimensional (3D) devices is a challenge in various emerging MEMS applications such as advanced biosensors and flow sensors. However, no conventional approach currently provides a versatile solution to vertically assemble sensitive or fragile microchips into a separate receiving substrate and to create electrical connections. In this study, we present a method to realize vertical magnetic-field-assisted assembly of discrete silicon microchips into a target receiving substrate and subsequent electrical contacting of the microchips by edge wire bonding, to create interconnections between the receiving substrate and the vertically oriented microchips. Vertical assembly is achieved by combining carefully designed microchip geometries for shape matching and striped patterns of the ferromagnetic material (nickel) on the backside of the microchips, enabling controlled vertical lifting directionality independently of the microchip's aspect ratio. To form electrical connections between the receiving substrate and a vertically assembled microchip, featuring standard metallic contact electrodes only on its frontside, an edge wire bonding process was developed to realize ball bonds on the top sidewall of the vertically placed microchip. The top sidewall features silicon trenches in correspondence to the frontside electrodes, which induce deformation of the free air balls and result in both mechanical ball bond fixation and around-the-edge metallic connections. The edge wire bonds are realized at room temperature and show minimal contact resistance (<0.2 Ω) and excellent mechanical robustness (>168 mN in pull tests). In our approach, the microchips and the receiving substrate are independently manufactured using standard silicon micromachining processes and materials, with a subsequent heterogeneous integration of the components. Thus, this integration technology potentially enables emerging MEMS applications that require 3D out-of-plane assembly of microchips.
Project description:Chitosan has been used as a scaffolding material in tissue engineering due to its mechanical properties and biocompatibility. With increased appreciation of the effect of micro- and nanoscale environments on cellular behavior, there is increased emphasis on generating microfabricated chitosan structures. Here we employed a microfluidic coaxial flow-focusing system to generate cell adhesive chitosan microtubes of controlled sizes by modifying the flow rates of a chitosan pre-polymer solution and phosphate buffered saline (PBS). The microtubes were extruded from a glass capillary with a 300 ?m inner diameter. After ionic crosslinking with sodium tripolyphosphate (TPP), fabricated microtubes had inner and outer diameter ranges of 70-150 ?m and 120-185 ?m. Computational simulation validated the controlled size of microtubes and cell attachment. To enhance cell adhesiveness on the microtubes, we mixed gelatin with the chitosan pre-polymer solution. During the fabrication of microtubes, fibroblasts suspended in core PBS flow adhered to the inner surface of chitosan-gelatin microtubes. To achieve physiological pH values, we adjusted pH values of chiotsan pre-polymer solution and TPP. In particular, we were able to improve cell viability to 92 % with pH values of 5.8 and 7.4 for chitosan and TPP solution respectively. Cell culturing for three days showed that the addition of the gelatin enhanced cell spreading and proliferation inside the chitosan-gelatin microtubes. The microfluidic fabrication method for ionically crosslinked chitosan microtubes at physiological pH can be compatible with a variety of cells and used as a versatile platform for microengineered tissue engineering.
Project description:We describe a novel method for making microbottle-shaped lasers by using a CO2 laser to melt Er:Yb glass onto silica microcapillaries or fibres. This is realised by the fact that the two glasses have different melting points. The CO2 laser power is controlled to flow the doped glass around the silica cylinder. In the case of a capillary, the resulting geometry is a hollow, microbottle-shaped resonator. This is a simple method for fabricating a number of glass whispering gallery mode (WGM) lasers with a wide range of sizes on a single, micron-scale structure. The Er:Yb doped glass outer layer is pumped at 980 nm via a tapered optical fibre and WGM lasing is recorded around 1535 nm. This structure facilitates a new way to thermo-optically tune the microlaser modes by passing gas through the capillary. The cooling effect of the gas flow shifts the WGMs towards shorter wavelengths and thermal tuning of the lasing modes over 70 GHz is achieved. Results are fitted using the theory of hot wire anemometry, allowing the flow rate to be calibrated with a flow sensitivity as high as 72 GHz/sccm. Strain tuning of the microlaser modes by up to 60 GHz is also demonstrated.
Project description:A new method for synthesizing gold, nickel, and cobalt metal nanoparticles at room temperature from metal salts employing plasmid DNA in a toroidal topology as a sacrificial mold is presented. The diameter of the toroidal DNA drives the formation and size of the nanoparticle, and UV light initiates the oxidation of the DNA and concomitant reduction of the DNA bound metal ions. The nanoparticles were characterized by atomic force microscopy (AFM), transmission electron microscopy (TEM), and electron diffraction (ED).
Project description:Soft robot fabrication by casting liquid elastomer often requires multiple steps of casting or skillful manual labor. We present a novel soft robotic fabrication technique: negshell casting (negative-space eggshell casting), that reduces the steps required for fabrication by introducing 3D-printed thin-walled cores for use in casting that are meant to be left in place instead of being removed later in the fabrication process. Negshell casting consists of two types of cores: sacrificial cores (negshell cores) and structural cores. Negshell cores are designed to be broken into small pieces that have little effect on the mechanical structure of the soft robot, and can be used for creating fluidic channels and bellows for actuation. Structural cores, on the other hand, are not meant to be broken, and are for increasing the stiffness of soft robotic structures, such as endoskeletons. We describe the design and fabrication concepts for both types of cores and report the mechanical characterization of the cores embedded in silicone rubber specimens. We also present an example use-case of negshell casting for a single joint soft robotic finger, along with an experiment to demonstrate how negshell casting concepts can aid in force transmission. Finally, we present real-world usage of negshell casting in a 6 degree-of-freedom three-finger soft robotic gripper, and a demonstration of the gripper in a robotic pick-and-place task. A companion website with further details about fabrication (as well as an introduction to molding and casting for those who are unfamiliar with the terms), engineering file downloads, and experimental data is provided at https://negshell.github.io/.
Project description:Preorganization is a powerful tool in supramolecular chemistry which has been utilized successfully in intra- and intermolecular halogen bonding. In previous work, we had developed a bidentate bis(iodobenzimidazolium)-based halogen bond donor which featured a central trifluoromethyl substituent. This compound showed a markedly increased catalytic activity compared to unsubstituted bis(iodoimidazolium)-based Lewis acids, which could be explained either by electronic effects (the electron withdrawal by the fluorinated substituent) or by preorganization (the hindered rotation of the halogen bonding moieties). Herein, we systematically investigate the origin of this increased Lewis acidity via a comparison of the two types of compounds and their respective derivatives with or without the central trifluoromethyl group. Calorimetric measurements of halide complexations indicated that preorganization is the main reason for the higher halogen bonding strength. The performance of the catalysts in a series of benchmark reactions corroborates this finding.