Unknown

Dataset Information

0

Wafer-scale growth of VO2 thin films using a combinatorial approach.


ABSTRACT: Transition metal oxides offer functional properties beyond conventional semiconductors. Bridging the gap between the fundamental research frontier in oxide electronics and their realization in commercial devices demands a wafer-scale growth approach for high-quality transition metal oxide thin films. Such a method requires excellent control over the transition metal valence state to avoid performance deterioration, which has been proved challenging. Here we present a scalable growth approach that enables a precise valence state control. By creating an oxygen activity gradient across the wafer, a continuous valence state library is established to directly identify the optimal growth condition. Single-crystalline VO2 thin films have been grown on wafer scale, exhibiting more than four orders of magnitude change in resistivity across the metal-to-insulator transition. It is demonstrated that 'electronic grade' transition metal oxide films can be realized on a large scale using a combinatorial growth approach, which can be extended to other multivalent oxide systems.

SUBMITTER: Zhang HT 

PROVIDER: S-EPMC4633718 | biostudies-literature | 2015 Oct

REPOSITORIES: biostudies-literature

altmetric image

Publications

Wafer-scale growth of VO2 thin films using a combinatorial approach.

Zhang Hai-Tian HT   Zhang Lei L   Mukherjee Debangshu D   Zheng Yuan-Xia YX   Haislmaier Ryan C RC   Alem Nasim N   Engel-Herbert Roman R  

Nature communications 20151009


Transition metal oxides offer functional properties beyond conventional semiconductors. Bridging the gap between the fundamental research frontier in oxide electronics and their realization in commercial devices demands a wafer-scale growth approach for high-quality transition metal oxide thin films. Such a method requires excellent control over the transition metal valence state to avoid performance deterioration, which has been proved challenging. Here we present a scalable growth approach tha  ...[more]

Similar Datasets

| S-EPMC8516594 | biostudies-literature
| S-EPMC5508126 | biostudies-literature
| S-EPMC6641514 | biostudies-literature
| S-EPMC4543955 | biostudies-literature
| S-EPMC6660212 | biostudies-literature
| S-EPMC6077709 | biostudies-literature
| S-EPMC6297140 | biostudies-literature
| S-EPMC7244498 | biostudies-literature
| S-EPMC6488595 | biostudies-literature
| S-EPMC6695608 | biostudies-literature