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Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers.

ABSTRACT: AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.

SUBMITTER: Li N

PROVIDER: S-EPMC4683522 | biostudies-literature | 2015 Dec

REPOSITORIES: biostudies-literature

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Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers.

Li Nan N Yadav Satyesh K SK Wang Jian J Liu Xiang-Yang XY Misra Amit A

Scientific reports 20151218

AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of ...[more]

PMID: 26681109

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