Ontology highlight
ABSTRACT:
SUBMITTER: Liu CY
PROVIDER: S-EPMC6947395 | biostudies-literature | 2019 Dec
REPOSITORIES: biostudies-literature
Materials (Basel, Switzerland) 20191205 24
In this work, a sputtered AlN template is employed to grow high-quality AlGaN/GaN heterostructures, and the effects of AlN nucleation layer growth conditions on the structural and electrical properties of heterostructures are investigated in detail. The optimal growth condition is obtained with composited AlN nucleation layers grown on a sputtered AlN template, resulting in the smooth surface morphology and superior transport properties of the heterostructures. Moreover, high crystal quality GaN ...[more]