Ontology highlight
ABSTRACT:
SUBMITTER: Chang TH
PROVIDER: S-EPMC4985650 | biostudies-literature | 2016 Aug
REPOSITORIES: biostudies-literature
Chang Tzu-Hsuan TH Xiong Shisheng S Jacobberger Robert M RM Mikael Solomon S Suh Hyo Seon HS Liu Chi-Chun CC Geng Dalong D Wang Xudong X Arnold Michael S MS Ma Zhenqiang Z Nealey Paul F PF
Scientific reports 20160816
Directed self-assembly of block copolymers is a scalable method to fabricate well-ordered patterns over the wafer scale with feature sizes below the resolution of conventional lithography. Typically, lithographically-defined prepatterns with varying chemical contrast are used to rationally guide the assembly of block copolymers. The directed self-assembly to obtain accurate registration and alignment is largely influenced by the assembly kinetics. Furthermore, a considerably broad processing win ...[more]