Dataset Information
Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch-Mask Applications.
Ontology highlight
ABSTRACT:
SUBMITTER: Jeong HH
PROVIDER: S-EPMC5115431 | biostudies-literature | 2015 Jul
REPOSITORIES: biostudies-literature
Publications
Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch-Mask Applications.
Advanced science (Weinheim, Baden-Wurttemberg, Germany) 20150506 7
<b>A parallel nanolithographic patterning method</b> is presented that can be used to obtain arrays of multifunctional nanoparticles. These patterns can simply be converted into a variety of secondary nanopatterns that are useful for nanolithographic imprint, plasmonic, and etch-mask applications. ...[more]
