Ontology highlight
ABSTRACT:
SUBMITTER: Kryvchenkova O
PROVIDER: S-EPMC5140079 | biostudies-literature | 2016 Sep
REPOSITORIES: biostudies-literature
ACS applied materials & interfaces 20160915 38
The channel width-to-length ratio is an important transistor parameter for integrated circuit design. Contact diffusion into the channel during fabrication or operation alters the channel width and this important parameter. A novel methodology combining atomic force microscopy and scanning Kelvin probe microscopy (SKPM) with self-consistent modeling is developed for the nondestructive detection of contact diffusion on active devices. Scans of the surface potential are modeled using physically ba ...[more]