Ontology highlight
ABSTRACT:
SUBMITTER: Kum H
PROVIDER: S-EPMC5241666 | biostudies-literature | 2017 Jan
REPOSITORIES: biostudies-literature
Kum Hyun H Seong Han-Kyu HK Lim Wantae W Chun Daemyung D Kim Young-Il YI Park Youngsoo Y Yoo Geonwook G
Scientific reports 20170118
We present a method of epitaxially growing thermodynamically stable gallium nitride (GaN) nanorods via metal-organic chemical vapor deposition (MOCVD) by invoking a two-step self-limited growth (TSSLG) mechanism. This allows for growth of nanorods with excellent geometrical uniformity with no visible extended defects over a 100 mm sapphire (Al<sub>2</sub>O<sub>3</sub>) wafer. An ex-situ study of the growth morphology as a function of growth time for the two self-limiting steps elucidate the grow ...[more]