Ontology highlight
ABSTRACT:
SUBMITTER: Schiavone G
PROVIDER: S-EPMC5503316 | biostudies-literature | 2017 Mar
REPOSITORIES: biostudies-literature
Schiavone Giuseppe G Murray Jeremy J Perry Richard R Mount Andrew R AR Desmulliez Marc P Y MPY Walton Anthony J AJ
Materials (Basel, Switzerland) 20170322 3
This article presents a set of low-temperature deposition and etching processes for the integration of electrochemically deposited Ni-Fe alloys in complex magnetic microelectromechanical systems, as Ni-Fe is known to suffer from detrimental stress development when subjected to excessive thermal loads. A selective etch process is reported which enables the copper seed layer used for electrodeposition to be removed while preserving the integrity of Ni-Fe. In addition, a low temperature deposition ...[more]