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Dielectric Breakdown and Post-Breakdown Dissolution of Si/SiO2 Cathodes in Acidic Aqueous Electrochemical Environment.


ABSTRACT: Understanding the conducting mechanisms of dielectric materials under various conditions is of increasing importance. Here, we report the dielectric breakdown (DB) and post-breakdown mechanism of Si/SiO2, a widely used semiconductor and dielectric, in an acidic aqueous electrochemical environment. Cathodic breakdown was found to generate conduction spots on the Si/SiO2 surface. Using scanning electrochemical microscopy (SECM), the size and number of conduction spots are confirmed to increase from nanometer to micrometer scale during the application of negative voltage. The morphologies of these conduction spots reveal locally recessed inverted-pyramidal structures with exposed Si{111} sidewalls. The pits generation preceded by DB is considered to occur via cathodic dissolution of Si and exfoliation of SiO2 that are induced by local pH increases due to the hydrogen evolution reaction (HER) at the conduction spots. The HER at the conduction spots is more sluggish due to strongly hydrogen-terminated Si{111} surfaces.

SUBMITTER: Yun J 

PROVIDER: S-EPMC5789982 | biostudies-literature | 2018 Jan

REPOSITORIES: biostudies-literature

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Dielectric Breakdown and Post-Breakdown Dissolution of Si/SiO<sub>2</sub> Cathodes in Acidic Aqueous Electrochemical Environment.

Yun Jeongse J   Cho Yun-Bin YB   Jang Woohyuk W   Lee Jae Gyeong JG   Shin Samuel Jaeho SJ   Han Seok Hee SH   Lee Youngmi Y   Chung Taek Dong TD  

Scientific reports 20180130 1


Understanding the conducting mechanisms of dielectric materials under various conditions is of increasing importance. Here, we report the dielectric breakdown (DB) and post-breakdown mechanism of Si/SiO<sub>2</sub>, a widely used semiconductor and dielectric, in an acidic aqueous electrochemical environment. Cathodic breakdown was found to generate conduction spots on the Si/SiO<sub>2</sub> surface. Using scanning electrochemical microscopy (SECM), the size and number of conduction spots are con  ...[more]

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