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Aqueous ionic effect on electrochemical breakdown of Si-dielectric-electrolyte interface.

ABSTRACT: The breakdown of thin dielectric films (SiO₂, Si₃N₄, HfO₂) immersed in aqueous electrolyte was investigated. The current and the kinetics of dielectric breakdown caused by large cathodic electric field applied across the dielectric layer reveal the electrochemical nature of dielectric materials. Electrolytes play a huge role in the established dielectric-electrolyte interface with respect to the overall electrical behavior of the system. Although aqueous cations are considered as spectator ions in most electrochemical systems, in dielectric interfaces the current-potential characteristics depend on the type of cation. Computer simulation based on density functional theory and molecular dynamics showed cations affect the dielectric strength. The responses of various dielectric films to solution components provide invaluable information for dielectric-incorporated electrochemical systems.

SUBMITTER: Yun J

PROVIDER: S-EPMC7544892 | biostudies-literature | 2020 Oct

REPOSITORIES: biostudies-literature

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Aqueous ionic effect on electrochemical breakdown of Si-dielectric-electrolyte interface.

Yun Jeongse J Lee Jae Gyeong JG Oh Kyungbae K Kang Kisuk K Chung Taek Dong TD

Scientific reports 20201008 1

The breakdown of thin dielectric films (SiO2, Si3N4, HfO2) immersed in aqueous electrolyte was investigated. The current and the kinetics of dielectric breakdown caused by large cathodic electric field applied across the dielectric layer reveal the electrochemical nature of dielectric materials. Electrolytes play a huge role in the established dielectric-electrolyte interface with respect to the overall electrical behavior of the system. Although aqueo ...[more]

PMID: 33033305

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