Ontology highlight
ABSTRACT:
SUBMITTER: Cao YQ
PROVIDER: S-EPMC6092356 | biostudies-literature | 2018 Aug
REPOSITORIES: biostudies-literature
Cao Yan-Qiang YQ Zhao Xi-Rui XR Chen Jun J Zhang Wei W Li Min M Zhu Lin L Zhang Xue-Jin XJ Wu Di D Li Ai-Dong AD
Scientific reports 20180814 1
In this work, TiN film deposited by plasma enhanced atomic layer deposition (PEALD) is adopted to modify the commercial anatase TiO<sub>2</sub> powders. A series of analyses indicate that the surface modification of 20, 50 and 100 cycles of TiN by PEALD does not change the morphology, crystal size, lattice parameters, and surface area of TiO<sub>2</sub> nano powders, but forms an ultrathin amorphous layer of nitrogen doped TiO<sub>2</sub> (TiO<sub>x</sub>N<sub>y</sub>) on the powder surfaces. Th ...[more]