Ontology highlight
ABSTRACT:
SUBMITTER: Gajula D
PROVIDER: S-EPMC6187712 | biostudies-literature | 2018 Apr
REPOSITORIES: biostudies-literature
Gajula Durga D Jahangir Ifat I Koley Goutam G
Micromachines 20180428 5
A highly sensitive Gallium Nitride (GaN) diaphragm based micro-scale pressure sensor with an AlGaN/GaN heterostructure field effect transistor (HFET) deflection transducer has been designed and fabricated for high temperature applications. The performance of the pressure sensor was studied over a pressure range of 20 kPa, which resulted in an ultra-high sensitivity of ~0.76%/kPa, with a signal-to-noise ratio as high as 16 dB, when biased optimally in the subthreshold region. A high gauge factor ...[more]