Ontology highlight
ABSTRACT:
SUBMITTER: Chang TH
PROVIDER: S-EPMC5527108 | biostudies-literature | 2017 Jul
REPOSITORIES: biostudies-literature
Chang Tzu-Hsuan TH Xiong Kanglin K Park Sung Hyun SH Yuan Ge G Ma Zhenqiang Z Han Jung J
Scientific reports 20170725 1
Single crystal semiconductor nanomembranes (NM) are important in various applications such as heterogeneous integration and flexible devices. This paper reports the fabrication of AlGaN/GaN NMs and NM high electron mobility transistors (HEMT). Electrochemical etching is used to slice off single-crystalline AlGaN/GaN layers while preserving their microstructural quality. A double heterostructure design with a symmetric strain profile is employed to ensure minimal residual strain in freestanding N ...[more]