Ontology highlight
ABSTRACT:
SUBMITTER: Roelsgaard M
PROVIDER: S-EPMC6400190 | biostudies-literature | 2019 Mar
REPOSITORIES: biostudies-literature
Roelsgaard Martin M Dippel Ann-Christin AC Borup Kasper Andersen KA Nielsen Ida Gjerlevsen IG Broge Nils Lau Nyborg NLN Röh Jan Torben JT Gutowski Olof O Iversen Bo Brummerstedt BB
IUCrJ 20190223 Pt 2
Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained <i>in situ</i> during thin-film deposition by radio-frequency magnetron sputtering. A benchmark system of Pt was investigated in a novel sputtering chamber mounted on beamline P07-EH2 at the PETRA III synchrotron. Robust and ...[more]