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Particle Tracking of Microelectromechanical System Performance and Reliability.

ABSTRACT: Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion.

SUBMITTER: Copeland CR

PROVIDER: S-EPMC6512989 | biostudies-literature | 2018

REPOSITORIES: biostudies-literature

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Particle Tracking of Microelectromechanical System Performance and Reliability.

Copeland Craig R CR McGray Craig D CD Geist Jon J Stavis Samuel M SM

Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems 20180101

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion <i>in operando</i> at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability w ...[more]

PMID: 31093003

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