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ABSTRACT:
SUBMITTER: Valsecchi C
PROVIDER: S-EPMC6539013 | biostudies-literature | 2019 May
REPOSITORIES: biostudies-literature
Valsecchi Chiara C Gomez Armas Luis Enrique LE Weber de Menezes Jacson J
Sensors (Basel, Switzerland) 20190511 9
Several fabrication techniques are recently used to produce a nanopattern for sensing, as focused ion beam milling (FIB), e-beam lithography (EBL), nanoimprinting, and soft lithography. Here, interference lithography is explored for the fabrication of large area nanohole arrays in metal films as an efficient, flexible, and scalable production method. The transmission spectra in air of the 1 cm<sup>2</sup> substrate were evaluated to study the substrate behavior when hole-size, periodicity, and f ...[more]