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Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering.

ABSTRACT: We propose a method for fabricating high-hardness plasma-polymer-fluorocarbon (PPFC) thin films with controllable optical and surface properties via manipulation of the target composition design and sputtering power density. The carbon/polytetrafluoroethylene (PTFE) composite polymeric material targets with the low electrical resistance were prepared by press-molding using a mechanically mixed powder of PTFE, carbon nanotubes, and graphite. The composite targets showed electrical sheet resistances of 0.1-100 ?/sq. PPFC thin films were deposited by mid-range frequency (MF) sputtering at power densities within 0.62~4.92?W/cm². The maximum surface hardness of the PPFC thin film was 4.75?GPa, which was 21.6 times higher than that of fluorocarbon thin film sputtered from PTFE under the same conditions. With the increase of the carbon concentration in the target, the carbon cross-linking density of the PPFC thin film increased but the fluorine concentration decreased. The concentration of fluorine in the PPFC thin films grew with increasing sputtering power density. The MF sputtered carbon-rich PPFC thin films are controllable with physical properties of optical transmittance, surface hardness and surface water repellency which could be applied as protective layers for transparent flexible devices.

SUBMITTER: Kim SH

PROVIDER: S-EPMC6650446 | biostudies-literature | 2019 Jul

REPOSITORIES: biostudies-literature

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Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering.

Kim Sung Hyun SH Kim Mac M Um Min Seop MS Choi Woo Jin WJ Lee Jae Heung JH Yang Yong Suk YS Lee Sang-Jin SJ

Scientific reports 20190723 1

We propose a method for fabricating high-hardness plasma-polymer-fluorocarbon (PPFC) thin films with controllable optical and surface properties via manipulation of the target composition design and sputtering power density. The carbon/polytetrafluoroethylene (PTFE) composite polymeric material targets with the low electrical resistance were prepared by press-molding using a mechanically mixed powder of PTFE, carbon nanotubes, and graphite. The composite targets showed electrical sheet resistanc ...[more]

PMID: 31337795

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Project description:A new strategy to nanoengineer gold/fluorocarbon multilayer (ML) nanostructures is reported. We have investigated the morphological changes occurring at the metal-polymer interface in ML structures with varying volume fraction of gold (Au) and the kinetic growth aspect of the microscale properties of nano-sized Au in plasma polymer fluorocarbon (PPFC). Investigations were carried out at various temperatures and annealing times by means of grazing incidence small-angle and wide-angle X-ray scattering (GISAXS and GIWAXS). We have fabricated a series of MLs with varying volume fraction (0.12, 0.27, 0.38) of Au and bilayer periodicity in ML structure. They show an interesting granular structure consisting of nearly spherical nanoparticles within the polymer layer. The nanoparticle (NP) morphology changes due to the collective effects of NPs diffusion within ensembles in the in-plane vicinity and interlayer with increasing temperature. The in-plane NPs size distinctly increases with increasing temperature. The NPs become more spherical, thus reducing the surface energy. Linear growth of NPs with temperature and time shows diffusion-controlled growth of NPs in the ML structure. The structural stability of the multilayer is controlled by the volume ratio of the metal in polymer. At room temperature, UV-Vis shows a blue shift of the plasmon peak from 560 nm in ML Au/PTFE_1 to 437 nm in Au/PTFE_3. We have identified the fabrication and postdeposition annealing conditions to limit the local surface plasmon resonance (LSPR) shift from Δ λ L S P R = 180 nm (Au/PTFE_1) to Δ λ L S P R = 67 nm (Au/PTFE_3 ML)) and their optical response over a wide visible wavelength range. A variation in the dielectric constant of the polymer in presence of varying Au inclusion is found to be a possible factor affecting the LSPR frequency. Our findings may provide insights in nanoengineering of ML structure that can be useful to systematically control the growth of NPs in polymer matrix.

Dataset Information

Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering.

Publications

Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering.

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