Ontology highlight
ABSTRACT:
SUBMITTER: Liu CF
PROVIDER: S-EPMC6723579 | biostudies-literature | 2019 Aug
REPOSITORIES: biostudies-literature
Nanomaterials (Basel, Switzerland) 20190804 8
The resistive switching (RS) characteristics of flexible films deposited on mica substrates have rarely been reported upon, especially flexible HfO<sub>2</sub> films. A novel flexible Au/HfO<sub>2</sub>/Pt/mica resistive random access memory device was prepared by a sol-gel process, and a Au/HfO<sub>2</sub>/Pt/Ti/SiO<sub>2</sub>/Si (100) device was also prepared for comparison. The HfO<sub>2</sub> thin films were grown into the monoclinic phase by the proper annealing process at 700 °C, demonstr ...[more]