Ontology highlight
ABSTRACT:
SUBMITTER: Zhao WJ
PROVIDER: S-EPMC6749266 | biostudies-literature | 2019 Aug
REPOSITORIES: biostudies-literature
Zhao Wen-Jie WJ Xu Dan D Chen Yin-Sheng YS Wang Xuan X Shi Yun-Bo YB
Sensors (Basel, Switzerland) 20190828 17
Air pollution is one of the major threats to human health. The monitoring of toxic NO<sub>2</sub> gas in urban air emission pollution is becoming increasingly important. Thus, the development of an NO<sub>2</sub> sensor with low power consumption, low cost, and high performance is urgent. In this paper, a planar structural micro hotplate gas sensor based on an AlN ceramic substrate with an annular Pt film heater was designed and prepared by micro-electro-mechanical system (MEMS) technology, in w ...[more]