Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers.

ABSTRACT: Two-dimensional (2D) layered transition metal dichalcogenides (TMDs) such as WS2 are promising materials for nanoelectronic applications. However, growth of the desired horizontal basal-plane oriented 2D TMD layers is often accompanied by the growth of vertical nanostructures that can hinder charge transport and, consequently, hamper device application. In this work, we discuss both the formation and suppression of vertical nanostructures during plasma-enhanced atomic layer deposition (PEALD) of WS2. Using scanning transmission electron microscopy studies, formation pathways of vertical nanostructures are established for a two-step (AB-type) PEALD process. Grain boundaries are identified as the principal formation centers of vertical nanostructures. Based on the obtained insights, we intro

SUBMITTER: Balasubramanyam S 

PROVIDER: S-EPMC6978813 | biostudies-literature | 2020 Jan

REPOSITORIES: biostudies-literature