Browse
Submit Data
Databases
API
Help

Dataset Information

0 Views

0 Connections

0 Citations

0 Reanalyses

0 Downloads

Omics score: 0

Atomic force microscopy data of novel high-k hydrocarbon films synthesized on Si wafers for gate dielectric applications.

ABSTRACT: This article presents data obtained from the atomic force microscopy (AFM) images of ultrathin high-k hydrocarbon (HC) films. The high-k HC films were synthesized on Si(100) wafers at various growth temperatures by using inductively-coupled plasma chemical vapor deposition with CH4 gas and a gas mixture consisting of 10% H2 and 90% Ar. The AFM images were obtained by tapping mode. The AFM results provide the surface topography, roughness, and thickness of the HC films as a function of growth temperature, which are essential data for high-k gate dielectrics of metal-insulator-semiconductor device applications. This data article is related to the article entitled, "Novel high-k gate dielectric properties of ultrathin hydrocarbon films for next-generation metal-insulator-semiconductor devices" (Kim et al., 2020) [1].

SUBMITTER: Kwon J

PROVIDER: S-EPMC7206205 | biostudies-literature | 2020 Jun

REPOSITORIES: biostudies-literature

ACCESS DATA

Json Xml

Publications

Atomic force microscopy data of novel high-k hydrocarbon films synthesized on Si wafers for gate dielectric applications.

Kwon Jihwan J Kim Dong-Ok DO Lee Sangyeob S Kim Eui-Tae ET

Data in brief 20200430

This article presents data obtained from the atomic force microscopy (AFM) images of ultrathin high-k hydrocarbon (HC) films. The high-k HC films were synthesized on Si(100) wafers at various growth temperatures by using inductively-coupled plasma chemical vapor deposition with CH4 gas and a gas mixture consisting of 10% H2 and 90% Ar. The AFM images were obtained by tapping mode. The AFM results provide the surface topography, roughness, and thickness of the ...[more]

PMID: 32395596

Similar Datasets

Atomic Force Microscopy Imaging of Adsorbed Pulmonary Surfactant Films.

Project description:Pulmonary surfactant (PS) is a lipid-protein complex that adsorbs to the air-water surface of the lung as a thin film. Previous studies have suggested that the adsorbed PS film is composed of an interfacial monolayer, plus a functionally attached vesicular complex, called the surface-associated surfactant reservoir. However, direct visualization of the lateral structure and morphology of adsorbed PS films using atomic force microscopy (AFM) has been proven to be technically challenging. To date, all AFM studies of the PS film have relied on the model of Langmuir monolayers. Here, we showed the first, to our knowledge, AFM imaging of adsorbed PS films under physiologically relevant conditions using a novel, to our knowledge, experimental methodology called constrained drop surfactometry. In conjunction with a series of methodological innovations, including subphase replacement, in situ Langmuir-Blodgett transfer, and real-time surface tension control using closed-loop axisymmetric drop shape analysis, constrained drop surfactometry allowed the study of lateral structure and topography of animal-derived natural PS films at physiologically relevant low surface tensions. Our data suggested that a nucleation-growth model is responsible for the adsorption-induced squeeze-out of the PS film, which likely results in an interfacial monolayer enriched in dipalmitoylphosphatidylcholine with the attached multilayered surface-associated surfactant reservoir. These findings were further supported by frequency-dependent measurements of surface dilational rheology. Our study provides novel, to our knowledge, biophysical insights into the understanding of the mechanisms by which the PS film attains low surface tensions and stabilizes the alveolar surface.

| S-EPMC7451931 | biostudies-literature

Colossal Permittivity and Low Dielectric Loss of Thermal Oxidation Single-Crystalline Si Wafers.

Project description:In this work, thin SiO₂ insulating layers were generated on the top and bottom surfaces of single-crystalline silicon plates (n type) by thermal oxidation to obtain an insulator/semiconductor/insulator (ISI) multilayer structure. X-ray diffraction (XRD) pattern and scanning electron microscope (SEM) pictures implied that all of the synthesized SiO₂ layers were amorphous. By controlling the thermal oxidation times, we obtained SiO₂ layers with various thicknesses. The dielectric properties of silicon plates with different thicknesses of SiO₂ layers (different thermal oxidation times) were measured. The dielectric properties of all of the single-crystalline silicon plates improved greatly after thermal oxidation. The dielectric constant of the silicon plates with SiO₂ layers was approximately 10⁴, which was approximately three orders more than that of the intrinsic single-crystalline silicon plate (11.9). Furthermore, both high permittivity and low dielectric loss (0.02) were simultaneously achieved in the single-crystalline silicon plates after thermal oxidation (ISI structure).

| S-EPMC6479920 | biostudies-literature

Solution-processed amorphous ZrO2 gate dielectric films synthesized by a non-hydrolytic sol-gel route.

Project description:Solution-processed zirconium oxide (ZrO2) dielectrics were formed via a non-hydrolytic sol-gel route at low-temperature, and are suitable for flexible thin film transistor (TFT) devices. Precursor solutions with equimolar zirconium halide and zirconium alkoxide were prepared, and amorphous ZrO2 films were obtained by spin-coating and annealing at 300 °C through the direct condensation reaction between them. The ZrO2 films exhibited a high dielectric constant near 10, and a low leakage current density of 5 × 10-8 A cm-2 at a field of 1 MV cm-1. High mobility p-type pentacene TFTs were fabricated using the ZrO2 dielectrics, with a saturation field-effect mobility of 3.7 cm2 V-1 s-1, a threshold voltage of -2.7 V, an on/off ratio of 1.1 × 106 and a subthreshold swing of 0.65 V dec-1.

| S-EPMC9090666 | biostudies-literature

Localization atomic force microscopy.

Project description:Understanding structural dynamics of biomolecules at the single-molecule level is vital to advancing our knowledge of molecular mechanisms. Currently, there are few techniques that can capture dynamics at the sub-nanometre scale and in physiologically relevant conditions. Atomic force microscopy (AFM)1 has the advantage of analysing unlabelled single molecules in physiological buffer and at ambient temperature and pressure, but its resolution limits the assessment of conformational details of biomolecules2. Here we present localization AFM (LAFM), a technique developed to overcome current resolution limitations. By applying localization image reconstruction algorithms3 to peak positions in high-speed AFM and conventional AFM data, we increase the resolution beyond the limits set by the tip radius, and resolve single amino acid residues on soft protein surfaces in native and dynamic conditions. LAFM enables the calculation of high-resolution maps from either images of many molecules or many images of a single molecule acquired over time, facilitating single-molecule structural analysis. LAFM is a post-acquisition image reconstruction method that can be applied to any biomolecular AFM dataset.

| S-EPMC8697813 | biostudies-literature

Imaging Water Thin Films in Ambient Conditions Using Atomic Force Microscopy.

Project description:All surfaces exposed to ambient conditions are covered by a thin film of water. Other than at high humidity conditions, i.e., relative humidity higher than 80%, those water films have nanoscale thickness. Nevertheless, even the thinnest film can profoundly affect the physical and chemical properties of the substrate. Information on the structure of these water films can be obtained from spectroscopic techniques based on photons, but these usually have poor lateral resolution. When information with nanometer resolution in the three dimensions is needed, for example for surfaces showing heterogeneity in water affinity at the nanoscale, Atomic Force Microscopy (AFM) is the preferred tool since it can provide such resolution while being operated in ambient conditions. A complication in the interpretation of the data arises when using AFM, however, since, in most cases, direct interaction between a solid probe and a solid surface occurs. This induces strong perturbations of the liquid by the probe that should be controlled or avoided. The aim of this review is to provide an overview of different AFM methods developed to overcome this problem, measuring different interactions between the AFM probe and the water films, and to discuss the type of information about the water film that can be obtained from these interactions.

| S-EPMC5456730 | biostudies-other

Electrostatic Discovery Atomic Force Microscopy.

Project description:While offering high resolution atomic and electronic structure, scanning probe microscopy techniques have found greater challenges in providing reliable electrostatic characterization on the same scale. In this work, we offer electrostatic discovery atomic force microscopy, a machine learning based method which provides immediate maps of the electrostatic potential directly from atomic force microscopy images with functionalized tips. We apply this to characterize the electrostatic properties of a variety of molecular systems and compare directly to reference simulations, demonstrating good agreement. This approach offers reliable atomic scale electrostatic maps on any system with minimal computational overhead.

| S-EPMC8793147 | biostudies-literature

Deep atomic force microscopy.

Project description:The Atomic Force Microscope (AFM) possesses several desirable imaging features including the ability to produce height profiles as well as two-dimensional images, in fluid or air, at high resolution. AFM has been used to study a vast selection of samples on the scale of angstroms to micrometers. However, current AFMs cannot access samples with vertical topography of the order of 100 μm or greater. Research efforts have produced AFM scanners capable of vertical motion greater than 100 μm, but commercially available probe tip lengths are still typically less than 10 μm high. Even the longest probe tips are below 100 μm and even at this range are problematic. In this paper, we present a method to hand-fabricate "Deep AFM" probes with tips of the order of 100 μm and longer so that AFM can be used to image samples with large scale vertical topography, such as fractured bone samples.

| S-EPMC3869821 | biostudies-other

Polynomial force approximations and multifrequency atomic force microscopy.

Project description:We present polynomial force reconstruction from experimental intermodulation atomic force microscopy (ImAFM) data. We study the tip-surface force during a slow surface approach and compare the results with amplitude-dependence force spectroscopy (ADFS). Based on polynomial force reconstruction we generate high-resolution surface-property maps of polymer blend samples. The polynomial method is described as a special example of a more general approximative force reconstruction, where the aim is to determine model parameters that best approximate the measured force spectrum. This approximative approach is not limited to spectral data, and we demonstrate how it can be adapted to a force quadrature picture.

| S-EPMC3701428 | biostudies-literature

Elemental Identification by Combining Atomic Force Microscopy and Kelvin Probe Force Microscopy.

Project description:There are currently no experimental techniques that combine atomic-resolution imaging with elemental sensitivity and chemical fingerprinting on single molecules. The advent of using molecular-modified tips in noncontact atomic force microscopy (nc-AFM) has made it possible to image (planar) molecules with atomic resolution. However, the mechanisms responsible for elemental contrast with passivated tips are not fully understood. Here, we investigate elemental contrast by carrying out both nc-AFM and Kelvin probe force microscopy (KPFM) experiments on epitaxial monolayer hexagonal boron nitride (hBN) on Ir(111). The hBN overlayer is inert, and the in-plane bonds connecting nearest-neighbor boron and nitrogen atoms possess strong covalent character and a bond length of only ∼1.45 Å. Nevertheless, constant-height maps of both the frequency shift Δ f and the local contact potential difference exhibit striking sublattice asymmetry. We match the different atomic sites with the observed contrast by comparison with nc-AFM image simulations based on the density functional theory optimized hBN/Ir(111) geometry, which yields detailed information on the origin of the atomic-scale contrast.

| S-EPMC6097802 | biostudies-literature

Few-cycle Regime Atomic Force Microscopy.

Project description:Traditionally, dynamic atomic force microscopy (AFM) techniques are based on the analysis of the quasi-steady state response of the cantilever deflection in terms of Fourier analysis. Here we describe a technique that instead exploits the often disregarded transient response of the cantilever through a relatively modern mathematical tool, which has caused important developments in several scientific fields but that is still quite unknown in the AFM context: the wavelet analysis. This tool allows us to localize the time-varying spectral composition of the initial oscillations of the cantilever deflection when an impulsive excitation is given (as in the band excitation method), a mode that we call the few-cycle regime. We show that this regime encodes very meaningful information about the tip-sample interaction in a unique and extremely sensitive manner. We exploit this high sensitivity to gain detailed insight into multiple physical parameters that perturb the dynamics of the AFM probe, such as the tip radius, Hamaker constant, sample's elastic modulus and height of an adsorbed water layer. We validate these findings with experimental evidence and computational simulations and show a feasible path towards the simultaneous retrieval of multiple physical parameters.

| S-EPMC6722071 | biostudies-literature