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ABSTRACT:
SUBMITTER: Chen CF
PROVIDER: S-EPMC7309018 | biostudies-literature | 2020 Jun
REPOSITORIES: biostudies-literature
Sensors (Basel, Switzerland) 20200605 11
The enhanced infrared absorbance (IRA) of the complementary metal-oxide-semiconductor (CMOS) compatible thermopile with the subwavelength rectangular-hole arrays in active area is investigated. The finite-difference time-domain (FDTD) method considered and analyzed the matrix arrangement (MA) and staggered arrangement (SA) of subwavelength rectangular-hole arrays (SRHA). For the better cases of MA-SRHA and SA-SRHA, the geometric parameters are the same and the infrared absorption efficiency (IAE ...[more]