Practical Guide to the Design, Fabrication, and Calibration of NIST Nanocalorimeters
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ABSTRACT: We report here on the design, fabrication, and calibration of nanocalorimeter sensors used in the National Institute of Standards and Technology (NIST) Nanocalorimetry Measurements Project. These small-scale thermal analysis instruments are produced using silicon microfabrication approaches. A single platinum line serves as both the heater and temperature sensor, and it is made from a 500 μm wide, 100 nm thick platinum trace, suspended on a 100 nm thick silicon nitride membrane for thermal isolation. Supplemental materials to this article (available online) include drawing files and LabVIEW code used in the fabrication and calibration process.
SUBMITTER: Yi F
PROVIDER: S-EPMC7340549 | biostudies-literature |
REPOSITORIES: biostudies-literature
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