State of the Art and Future Perspectives in Advanced CMOS Technology.
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ABSTRACT:
SUBMITTER: Radamson HH
PROVIDER: S-EPMC7466708 | biostudies-literature | 2020 Aug
REPOSITORIES: biostudies-literature
Publications
State of the Art and Future Perspectives in Advanced CMOS Technology.
Radamson Henry H HH Zhu Huilong H Wu Zhenhua Z He Xiaobin X Lin Hongxiao H Liu Jinbiao J Xiang Jinjuan J Kong Zhenzhen Z Xiong Wenjuan W Li Junjie J Cui Hushan H Gao Jianfeng J Yang Hong H Du Yong Y Xu Buqing B Li Ben B Zhao Xuewei X Yu Jiahan J Dong Yan Y Wang Guilei G
Nanomaterials (Basel, Switzerland) 20200807 8
The international technology roadmap of semiconductors (ITRS) is approaching the historical end point and we observe that the semiconductor industry is driving complementary metal oxide semiconductor (CMOS) further towards unknown zones. Today's transistors with 3D structure and integrated advanced strain engineering differ radically from the original planar 2D ones due to the scaling down of the gate and source/drain regions according to Moore's law. This article presents a review of new archit ...[more]
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