Data relating to mems piezoelectric micro power harvester physical parameter optimization, for extremely low frequency and low vibration level applications.
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ABSTRACT:
SUBMITTER: Alrashdan MHS
PROVIDER: S-EPMC7704336 | biostudies-literature |
REPOSITORIES: biostudies-literature
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Project description:The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution and high output power density, so it has become a research hotspot of the PVEH. However, its electromechanical model needs to be further studied. In this paper, the bidirectional coupled distributed parameter electromechanical model of the MEMS VCSCB based PVEH is constructed, analytically solved, and verified, which laid an important theoretical foundation for structural design and optimization, performance improvement, and output prediction of the PVEH. Based on the constructed model, the output performances of five kinds of VCSCB based PVEHs with different cross-sectional shapes were compared and analyzed. The results show that the PVEH with the concave quadratic beam shape has the best output due to the uniform surface stress distribution. Additionally, the influence of the main structural parameters of the MEMS trapezoidal cantilever beam (TCB) based PVEH on the output performance of the device is theoretically analyzed. Finally, a prototype of the Aluminum Nitride (AlN) TCB based PVEH is designed and developed. The peak open-circuit voltage and normalized power density of the device can reach 5.64 V and 742 μW/cm3/g2, which is in good agreement with the theoretical model value. The prototype has wide application prospects in the power supply of the wireless sensor network node such as the structural health monitoring system and the Internet of Things.
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Project description:Acoustic energy transfer is a promising energy harvesting technology candidate for implantable biomedical devices. However, it does not show competitive strength for enabling self-powered implantable biomedical devices due to two issues - large size of bulk piezoelectric ultrasound transducers and output power fluctuation with transferred distance due to standing wave. Here we report a microelectromechanical systems (MEMS) based broadband piezoelectric ultrasonic energy harvester (PUEH) to enable self-powered implantable biomedical devices. The PUEH is a microfabricated lead zirconate titanate (PZT) diaphragm array and has wide operation bandwidth. By adjusting frequency of the input ultrasound wave within the operation bandwidth, standing wave effect can be minimized for any given distances. For example, at 1 cm distance, power density can be increased from 0.59 μW/cm(2) to 3.75 μW/cm(2) at input ultrasound intensity of 1 mW/cm(2) when frequency changes from 250 to 240 kHz. Due to the difference of human body and manual surgical process, distance fluctuation for implantable biomedical devices is unavoidable and it strongly affects the coupling efficiency. This issue can be overcome by performing frequency adjustment of the PUEH. The proposed PUEH shows great potential to be integrated on an implanted biomedical device chip as power source for various applications.
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Project description:The single-tone sound source localization (SSL) by majority of fly Ormia ochracea's ears-inspired directional microphones leaves a limited choice when an application like hearing aid (HA) demands broadband SSL. Here, a piezoelectric MEMS directional microphone using a modified mechanical model of fly's ear has been presented with primary focus to achieve SSL in most sensitive audio bands to mitigate the constraints of traditional SSL works. In the modified model, two optimized rectangular diaphragms have been pivoted by four optimized torsional beams; while the backside of the whole structure has been etched. As a result, the SSL relative to angular rotation of the incoming sound depicts the cosine dependency as an ideal pressure-gradient sensor. At the same time, the mechanical coupling leads the magnitude difference between two diaphragms which has been accounted as SSL in frequency domain. The idea behind this work has been analytical simulated first, and with the convincing mechanical results, the designed bio-inspired directional microphone (BDM) has been fabricated using commercially available MEMSCAP based on PiezoMUMPS processes. In an anechoic chamber, the fabricated device has been excited in free-field sound, and the SSL at 1 kHz frequency, rocking frequency, bending frequency, and in-between rocking and bending frequencies has been found in full compliance with the given angle of incidence of sound. With the measured inter-aural sensitivity difference (mISD) and directionality, the developed BDM has been demonstrated as a practical SSL device, and the results have been found in a perfect match with the given angle of incidence of sound. Furthermore, to facilitate the SSL in noisy environment, the noise has been optimized in all scopes, like the geometry of the diaphragm, supportive torsional beam, and sensing. As a result, the A-weighted noise of this work has been found less than 23 dBA across the audio bands, and the equivalent-input noise (EIN) has been found to be 25.52 dB SPL at 1 kHz frequency which are the lowest ever reported by a similar device. With the developed SSL in broadband-in addition to the lowest noise-the developed device can be extended in some audio applications like an HA device.
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Project description:This paper reports the results of the influence of the energy of laser pulses during laser ablation on the morphology and electro-physical properties of LiNbO3 nanocrystalline films. It is found that increasing laser pulse energy from 180 to 220 mJ results in the concentration of charge carriers in LiNbO3 films decreasing from 8.6 × 1015 to 1.0 × 1013 cm-3, with the mobility of charge carriers increasing from 0.43 to 17.4 cm2/(V·s). In addition, experimental studies of sublayer material effects on the geometric parameters of carbon nanotubes (CNTs) are performed. It is found that the material of the lower electrode has a significant effect on the formation of CNTs. CNTs obtained at the same growth time on a sample with a Cr sublayer have a smaller diameter and a longer length compared to samples with a V sublayer. Based on the obtained results, the architecture of the energy nanogenerator is proposed. The current generated by the nanogenerator is 18 nA under mechanical stress of 600 nN. The obtained piezoelectric nanogenerator parameters are used to estimate the parameters of the hybrid-carbon-nanostructures-based piezoelectric energy converter. Obtained results are promising for the development of efficient energy converters for alternative energy devices based on lead-free ferroelectric films.
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Project description:A MEMS electrostatic kinetic energy harvester (e-KEH) of about 1?cm2, working at ultralow frequency (1-20?Hz), without any supported additional mass on its mobile electrode, and working even without a vacuum environment is reported. The prototype is especially suitable for environments with abundant low frequency motions such as wearable electronics. The proposed e-KEH consists of a capacitor with a finger-teeth interdigited comb structure. This greatly reduces the air damping effect, and thus the capacitance variation remains important regardless of the presence of air. With the new design, the energy transduced per cycle of excitation is no less than 33 times higher than the classic design within 10-40?Hz/2 g peak, while is 85 times higher at 15?Hz/2 g peak. An enclosed miniature ball combined with non-linear stoppers enables the oscillation of the movable electrode through impact-based frequency up-conversion mechanism, which is also improved by the low air damping. Thanks to this new design, a higher efficiency than the classic gap-closing comb structure is obtained, as a larger range of working frequency (1-180?Hz) in air. A maximum energy conversion of 450?nJ/cycle is obtained with a bias voltage of 45?V and an acceleration of 11?Hz, 3 g peak. Working with a diode AC-DC rectifier, the proposed KEH is able to support up to 3 RFID communications within 16?s while operated at 11?Hz, 3 g peak.
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Project description:The objective of this study is to develop the first fully passive nonlinear piezoelectric tuned vibration absorber (NPTVA). The NPTVA is designed to mitigate a specific resonance of a nonlinear host structure. To avoid the use of synthetic inductors which require external power, closed magnetic circuits in ferrite material realize the large inductance values required by vibration mitigation at low frequencies. The saturation of an additional passive inductor is then exploited to build the nonlinearity in the NPTVA. The performance of the proposed device is demonstrated both numerically and experimentally.This article is part of the theme issue 'Nonlinear energy transfer in dynamical and acoustical systems'.
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Project description:Ultrasonic driven wireless charging technology has recently attracted much attention in the next generation bio-implantable systems; however, most developed ultrasonic energy harvesters are bulky and rigid and cannot be applied to general complex surfaces. Here, a flexible piezoelectric ultrasonic energy harvester (PUEH) array was designed and fabricated by integrating a large number of piezoelectric active elements with multilayered flexible electrodes in an elastomer membrane. The developed flexible PUEH device can be driven by the ultrasonic wave to produce continuous voltage and current outputs on both planar and curved surfaces, reaching output signals of more than 2 Vpp and 4 μA, respectively. Potential applications of using the flexible PUEH to charge energy-storage devices and power commercial electronics were demonstrated. Its low attenuation performance was also evaluated using the in vitro test of transmitting power through pork tissue, demonstrating its potential use in the next generation of wirelessly powered bio-implantable micro-devices.
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Project description:We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO2 insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mVrms/Oe, 0.156 mVrms/Oe, and 0.035 mVrms/Oe, respectively, for sensing element A and 0.033 mVrms/Oe, 0.044 mVrms/Oe, and 0.130 mVrms/Oe, respectively, for sensing element B.
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Project description:Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 ?m × 100 ?m × 2.25 ?m). These actuators are composed by two beam types (2.25 ?m thickness) with different cross-section area, which are separated by 2 ?m gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V®) process, obtaining a small footprint size (1028 ?m × 1028 µm) for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width) and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption.
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Project description:The data presented in this article is in relation to the research article "Vibration energy harvesting based monitoring of an operational bridge undergoing forced vibration and train passage" Cahill et al. (2018) [1]. The article provides data on the full-scale bridge testing using piezoelectric vibration energy harvesters on Pershagen Bridge, Sweden. The bridge is actively excited via a swept sinusoidal input. During the testing, the bridge remains operational and train passages continue. The test recordings include the voltage responses obtained from the vibration energy harvesters during these tests and train passages. The original dataset is made available to encourage the use of energy harvesting for Structural Health Monitoring.
| S-EPMC5789150 | biostudies-literature