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Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester.

ABSTRACT: The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution and high output power density, so it has become a research hotspot of the PVEH. However, its electromechanical model needs to be further studied. In this paper, the bidirectional coupled distributed parameter electromechanical model of the MEMS VCSCB based PVEH is constructed, analytically solved, and verified, which laid an important theoretical foundation for structural design and optimization, performance improvement, and output prediction of the PVEH. Based on the constructed model, the output performances of five kinds of VCSCB based PVEHs with different cross-sectional shapes were compared and analyzed. The results show that the PVEH with the concave quadratic beam shape has the best output due to the uniform surface stress distribution. Additionally, the influence of the main structural parameters of the MEMS trapezoidal cantilever beam (TCB) based PVEH on the output performance of the device is theoretically analyzed. Finally, a prototype of the Aluminum Nitride (AlN) TCB based PVEH is designed and developed. The peak open-circuit voltage and normalized power density of the device can reach 5.64 V and 742 μW/cm³/g², which is in good agreement with the theoretical model value. The prototype has wide application prospects in the power supply of the wireless sensor network node such as the structural health monitoring system and the Internet of Things.

SUBMITTER: He X

PROVIDER: S-EPMC8304101 | biostudies-literature |

REPOSITORIES: biostudies-literature

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Project description:Piezoelectric energy harvesting systems have been drawing the attention of the research community over recent years due to their potential for recharging/replacing batteries embedded in low-power-consuming smart electronic devices and wireless sensor networks. However, conventional linear piezoelectric energy harvesters (PEH) are often not a viable solution in such advanced practices, as they suffer from a narrow operating bandwidth, having a single resonance peak present in the frequency spectrum and very low voltage generation, which limits their ability to function as a standalone energy harvester. Generally, the most common PEH is the conventional cantilever beam harvester (CBH) attached with a piezoelectric patch and a proof mass. This study investigated a novel multimode harvester design named the arc-shaped branch beam harvester (ASBBH), which combined the concepts of the curved beam and branch beam to improve the energy-harvesting capability of PEH in ultra-low-frequency applications, in particular, human motion. The key objectives of the study were to broaden the operating bandwidth and enhance the harvester's effectiveness in terms of voltage and power generation. The ASBBH was first studied using the finite element method (FEM) to understand the operating bandwidth of the harvester. Then, the ASBBH was experimentally assessed using a mechanical shaker and real-life human motion as excitation sources. It was found that ASBBH achieved six natural frequencies within the ultra-low frequency range (<10 Hz), in comparison with only one natural frequency achieved by CBH within the same frequency range. The proposed design significantly broadened the operating bandwidth, favouring ultra-low-frequency-based human motion applications. In addition, the proposed harvester achieved an average output power of 427 μW at its first resonance frequency under 0.5 g acceleration. The overall results of the study demonstrated that the ASBBH design can achieve a broader operating bandwidth and significantly higher effectiveness, in comparison with CBH.

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Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester.

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