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Crystal orientation dictated epitaxy of ultrawide-bandgap 5.4- to 8.6-eV ?-(AlGa)2O3 on m-plane sapphire.


ABSTRACT: Ultrawide-bandgap semiconductors are ushering in the next generation of high-power electronics. The correct crystal orientation can make or break successful epitaxy of such semiconductors. Here, it is found that single-crystalline layers of ?-(AlGa)2O3 alloys spanning bandgaps of 5.4 to 8.6 eV can be grown by molecular beam epitaxy. The key step is found to be the use of m-plane sapphire crystal. The phase transition of the epitaxial layers from the ?- to the narrower bandgap ?-phase is catalyzed by the c-plane of the crystal. Because the c-plane is orthogonal to the growth front of the m-plane surface of the crystal, the narrower bandgap pathways are eliminated, revealing a route to much wider bandgap materials with structural purity. The resulting energy bandgaps of the epitaxial layers span a broad range, heralding the successful epitaxial stabilization of the largest bandgap materials family to date.

SUBMITTER: Jinno R 

PROVIDER: S-EPMC7793576 | biostudies-literature | 2021 Jan

REPOSITORIES: biostudies-literature

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Crystal orientation dictated epitaxy of ultrawide-bandgap 5.4- to 8.6-eV α-(AlGa)<sub>2</sub>O<sub>3</sub> on m-plane sapphire.

Jinno Riena R   Chang Celesta S CS   Onuma Takeyoshi T   Cho Yongjin Y   Ho Shao-Ting ST   Rowe Derek D   Cao Michael C MC   Lee Kevin K   Protasenko Vladimir V   Schlom Darrell G DG   Muller David A DA   Xing Huili G HG   Jena Debdeep D  

Science advances 20210108 2


Ultrawide-bandgap semiconductors are ushering in the next generation of high-power electronics. The correct crystal orientation can make or break successful epitaxy of such semiconductors. Here, it is found that single-crystalline layers of α-(AlGa)<sub>2</sub>O<sub>3</sub> alloys spanning bandgaps of 5.4 to 8.6 eV can be grown by molecular beam epitaxy. The key step is found to be the use of m-plane sapphire crystal. The phase transition of the epitaxial layers from the α- to the narrower bandg  ...[more]

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